DEVICE OF AEROSOL-JET DEPOSITION AND FABRICATION METHOD OF ABSORBER LAYER THEREBY

摘要

PURPOSE: An aerosol jet deposition apparatus and a manufacturing method of a light absorption layer using the same are provided to apply a thin film as a core light absorption layer of an I-III-VI2 compound thin film solar cell by manufacturing a CuInS2 thin film with excellent thin film properties. CONSTITUTION: A nozzle assembly(11) includes a nozzle(12). The nozzle controls the size of a deposition face by controlling the number of spraying holes. A substrate support(22) is formed on the lower part of the nozzle assembly. The substrate support includes a substrate on which a thin film is deposited. A substrate heater(23) heats the substrate 50C to 600C. A pump(31) is connected to a vacuum chamber(21) to form vacuum in the vacuum chamber.