MANUFACTURING METHOD OF A CATALYST FOR DECOMPOSING NANO SILICA-SUPPORTED PERFLUORO COMPOUND GAS FROM SEMICONDUCTOR PROCESSES AND THE CATALYST FOR DECOMPOSING NANO SILICA-SUPPORTED PERFLUORO COMPOUND GAS CAPABLE OF IMPROVING THE DECOMPOSITION PERFORMANCE OF NON-DEGRADABLE PERFLUORO COMPOUND GAS

摘要

PURPOSE: A manufacturing method of a catalyst for decomposing nano silica-supported perfluoro compound(PFC) gas from semiconductor processes and the catalyst for decomposing nano silica-supported PFC gas are provided to efficiently decompose the PFC gas on the basis of the physical effect of nano-silica.;CONSTITUTION: A manufacturing method of a catalyst for decomposing nano silica-supported PFC gas from semiconductor processes includes the following: Tetraethyl orthosilicate, ammonia water, and secondary distilled water are introduced into ethanol, and the mixture is agitated at a temperature between 20 and 30 deg C for 6 to 8 hours to prepare nano silica sol. Al(OH)_3 is introduced into the nano silica sol, and the nano silica sol is precipitated. The precipitated product is filtered and washed. Secondary distilled water is introduced into the washed product and is agitated at a temperature between 60 and 80 deg C at 200 to 400 rpm for 1 hour; catalysts are introduced into the resultant product to obtain solid materials; the solid materials are thermally treated to prepare a nano-oxidized catalyst.;COPYRIGHT KIPO 2013