HIGH FREQUENCY PLASMA JET SOURCE AND METHOD FOR IRRADIATING A SURFACE

摘要

The present invention for plasma plasma space (3) , in order to obtain a high frequency to ignite a plasma - a plasma radiation source from the electric means for applying an electric voltage to the (1) ( 8, 9) , the plasma space (3) emitted from the plasma () drawing means for drawing (4) and take-off grid (4) via a vacuum chamber (7) including a separate outlet opening a high-frequency - a plasma emission source (1) . Plasma Emission () is a high-frequency - radiation from the plasma source (1) is essentially the outlet has a diverging radiation characteristics . In addition, the present invention be of the plasma emission () radiating the high frequency - related to a method of irradiating the surface by plasma emission () of the plasma radiation source