GANTRY STAGE ORTHOGONALITY ERROR MEASUREMENT AND COMPENSATION METHOD ON HOMING PROCESSING

摘要

The present invention provides improved squareness error measurement method and that error compensation origin on the return method, and more particularly homing homing of the gantry structured stages used in semiconductor and FPD equipment and precision machining equipment repeatability of the gantry structured stages and perpendicularity of the perpendicular to the gantry structure type stage that minimizes the error also relates to an error measurement method and error compensation method origin return. ; Squareness error measurement method and error compensation method of the zero return Gantry stage according to the invention is structured in a gantry structure type stage to align the squareness is mechanically read by the steps of storing the value of the current encoder position; Wherein the low-speed driving, while the gantry stage structured monitoring the homing sensor or encoder index signals which are respectively installed on the master axis and the slave axis of the Gantry stage and structured; When the index signal is detected, and the master axis and slave axis or linear encoder value of the sensed position, comprising the step of reading. ; Squareness error measurement method and error compensation method of the zero return Gantry stage structured in accordance with the present invention can reduce the manufacturing cost by using the encoder and the zero return sensor that is installed in the stage. ; Gantry structure, squareness, measurement error, error compensation, homing