DETECTION OF MACRO-DEFECTS USING MICRO-INSPECTION INPUTS

摘要

Inspection apparatus according to the invention includes an optical inspection means (28) for providing one or more optical inspection output representing the pattern of the cells is repeated on the substrate. Thereby analyzing means 32 is a group selected characteristic portions of the isolated cells to be repeated by receiving the one or more output optical inspection. Analysis reporting means with respect to the selected isolated of recurring cells group characteristics part, and providing an output indication of the change in at least one of said isolated group selected characteristic portions, In this case, the change is a plurality of cells of the repetitive cells It occurs along.