首页> 外国专利> A POLYCRYSTALLINE SILICON THIN FILM TRANSISTOR AND A FABRICATING METHOD WITH THE SAME AND A POLYCRYSTALLINE SILICON THIN FILM TRANSISTOR PALTE WITH THE SAME

A POLYCRYSTALLINE SILICON THIN FILM TRANSISTOR AND A FABRICATING METHOD WITH THE SAME AND A POLYCRYSTALLINE SILICON THIN FILM TRANSISTOR PALTE WITH THE SAME

机译:多晶硅硅薄膜晶体管及其制造方法和多晶硅硅薄膜晶体管相同

摘要

A polycrystalline silicon thin film transistor, a method for fabricating the same, and a polycrystalline silicon thin film transistor plate with the same are provided to reduce an off current of the transistor by forming at least one through-hole in an active layer. A polycrystalline silicon thin film transistor includes a channel region having at least two grains. The channel region has at least one through-hole which is formed in a longitudinal direction of the channel region, so that the through-hole is formed between two grains. A source contact region(130) is formed opposite to a drain contact region(140), with the channel region being interposed between the source contact region and the drain contact region. A gate electrode is interposed between the channel region and the gate insulation film. A source electrode is connected to the source contact region.
机译:提供了一种多晶硅薄膜晶体管,其制造方法以及具有该薄膜晶体管的多晶硅薄膜晶体管板,以通过在有源层中形成至少一个通孔来减小晶体管的截止电流。多晶硅薄膜晶体管包括具有至少两个晶粒的沟道区。通道区域具有在通道区域的纵向方向上形成的至少一个通孔,从而该通孔形成在两个晶粒之间。源极接触区(130)形成为与漏极接触区(140)相对,并且沟道区介于源极接触区和漏极接触区之间。栅电极插入在沟道区和栅绝缘膜之间。源电极连接到源接触区域。

著录项

  • 公开/公告号KR101157915B1

    专利类型

  • 公开/公告日2012-06-22

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20050059023

  • 发明设计人 우에모토 츠토무;

    申请日2005-07-01

  • 分类号H01L29/786;

  • 国家 KR

  • 入库时间 2022-08-21 17:07:54

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