COUPLED-CAVITY TYPE LINE NARROWING DEVICE AND LASER CAVITY HAVING THE SAME

摘要

PURPOSE: A line width reducing apparatus of a coupled resonator type and a laser resonator including the same are provided to let reflected beams re-enter a diffraction grid by reflecting diffracted laser beams. CONSTITUTION: A prism(100) expands laser beams. A first full mirror(200) reflects the laser beams expanded in the prism. A diffraction grid(300) re-reflects the laser beams of specific waves from the laser beams reflected from the first full mirror according to a diffraction condition. A second full mirror(400) reflects zeroth diffracted laser beams from the laser beams which are unable to be re-reflected to the first full mirror to the diffraction grid. A laser(600) comprises an output mirror(610), a laser chamber(620), and a laser beam oscillation part(630).