Micro-structure measurement device using diffraction of laser

摘要

The present invention relates to a measuring apparatus using the fine structure in the loop of the laser. The invention allows to observe a sample and a loop of light in various occurring when the laser beam is irradiated to the sample in the sample stand which the scanning of the laser and a monochromatic laser beam irradiated from the laser beam syringe with the laser beam a syringe at the same time characterized in that loops will composed of a detection member that. Using the device of the present invention can determine the distance between silteum or structure micron size such as a CD by using a loop to the laser and quantitatively, and in the case of fiber or fabric to the spacing of compactness of the gap can be seen to homogeneity. ;