APPARATUS FOR PRODUCING HIGH-CONCENTRATION OZONE GAS AND METHOD OF PRODUCING HIGH-CONCENTRATION OZONE GAS

摘要

more than a pre-determined pressure and ozonated gas having a concentration of atmospheric pressure, 0 under low temperature conditions, supplied into the high pressure downward in the adsorbent which has adsorbed on silica gel (6) fill in the desorption tower (4), and the plurality of adsorption-desorption tower (4) at least three tower desorption tower of the (4-1, 4-2, 4 3) a serial cycle arrangement to configure the main desorption tapgun (99), and the main adsorption-desorption tapgun the art (99) disposed parallel to one desorption tower and (4-4) to the secondary desorption tower (999) , by forming the main desorption tapgun 99 3 None of the tower in the desorption process, and does not period so as to desorb the ozone adsorption and desorption in a secondary container (999) of, and to continuously output high-concentration ozone in a large flow rate . Thus, by generating a high-concentration ozonized gas efficiently, increasing the amount of ozone that can be output, and to reduce the amount of exhaust gas can not be output, a high concentration ozone gas generating device more compact, it is possible to improve the operability to be cheap.