Method of calibrating the pulse energy of the laser device USING COHERENT optic interferometer

摘要

1. A method for calibrating laser device a pulse energy provides working pulsed laser radiation, comprising executing on one or more test objects by the working laser ablations of test, test ablations preferably by a plurality of pulses with different energy value for each of said ablation depth measurement each of ablations and testing based on the measured values ​​of the depth of ablation and the ablation depth and definition of setpoint reference laser ma ve corresponding pulse energy set point, characterized in that the ablation depth measurement values ​​produced by a coherent optical interferometric measuring device. ! 2. A method according to claim 1, characterized in that the measuring device operates on the principle of the optical low-coherence reflectometry. ! 3. A method according to claim 1, characterized in that the ablation depth value measured using a measuring device formed of the measuring beam, which coincides with the direction of the working laser beam. ! 4. A method according to claim 1, characterized in that the test ablation performed on a test object which is moved relative to the measuring device in the intervals between successive test ablation. ! 5. A method according to claim 4, characterized in that the test ablation performed at a distance from the test disc center is used as the test object, wherein in the intervals between successive test ablation test disc is rotated by a predetermined angle. ! 6. A method according to claim 1, characterized in that on the test object