首页> 外国专利> Laser automated stations for contactless measurement of internal stresses AND CONTROL OF LOCAL optical inhomogeneities

Laser automated stations for contactless measurement of internal stresses AND CONTROL OF LOCAL optical inhomogeneities

机译:激光自动化工作站,用于非接触式内部应力测量和局部光学不均匀性的控制

摘要

The proposed utility model for contactless measurement of mechanical stresses and internal control local optical inhomogeneities relates to the field of electronics and can be used in the semiconductor industry as well as in the instrument and Radio Engineering.; The claimed technical solution is directed to a high-speed laser automated station for contactless measurement of mechanical stresses and internal control local optical inhomogeneities in optically transparent bodies in real time.; To solve this problem automated laser station has a platform on which the compact has a source of optical radiation, scan drive and optical-electrical components of the system. the optical radiation source is made single-mode and small divergence. Components opto-electrical system are structurally united in blocks: the polarization-modulating unit consisting of the polarizer and the Pockels cell, a bipolar AC voltage driver, and the optical head composed of short throw microscope objective, analyzer, collecting lens, and a photodetector with gallium-arsenide photodiode. Scanning Drive motors equipped with a speed of at least 10 mm / s, the control system and the digital processing features multichannel analog-to-digital converter with a conversion frequency of at least 1 MHz, integrated into the control computer.
机译:所提出的用于非接触式测量机械应力和内部控制局部光学不均匀性的实用新型涉及电子领域,可用于半导体工业以及仪器和无线电工程中。所要求保护的技术解决方案涉及一种高速激光自动化站,用于实时无接触测量机械应力和内部控制局部光学不均匀性。为了解决这个问题,自动激光站具有一个平台,在该平台上,紧凑型平台具有系统的光辐射源,扫描驱动器和光电组件。将光辐射源制成单模且发散小。组件光电系统在结构上分为多个单元:由偏振器和Pockels电池组成的偏振调制单元,双极性AC电压驱动器以及由短焦显微镜物镜,分析仪,收集透镜和光电探测器组成的光学头。与砷化镓光电二极管。装有速度至少为10 mm / s的扫描驱动电机,控制系统和数字处理功能集成在控制计算机中,多通道模数转换器的转换频率至少为1 MHz。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号