Laser automated stations for contactless measurement of internal stresses AND CONTROL OF LOCAL optical inhomogeneities

摘要

The invention relates to the field of electronics and can be used in the semiconductor industry, as well as in the instrument - and Radio Engineering. Proposed Laser automated station for contactless measurement of mechanical stresses and internal control local optical inhomogeneities, comprising a source of optical radiation, the optical-electrical system, scan drive control and digital processing system platform components opto-electrical system. A distinctive feature of the proposed station is that it comprises an all-metal frame made of two sections of the lattice structure mounted on the platform. Sections rigidly interconnected by a rod span. Each section of the frame mounted with guides arranged to guide the laser emitter, the optical-electrical components of the system. Thus the platform with an all-metal frame and placed on the platform to drive the scanning controller and power supply unit structurally combined in a measuring unit. A modulator driver photodetector preamplifier and the laser power are constructively united and installed in the electronic unit. In this case the measuring device and the electronic unit are electrically connected to each other and the host computer. The technical result is to simplify the assembly, installation and adjusting work, to ensure the convenience of the operator in the operation and maintenance of the device. 3 ZP f-ly 1 Fig.