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COMPOSITE Al MATERIAL REACTING WITH WATER, Al FILM REACTING WITH WATER, METHOD FOR OBTAINING Al FILM, AND COMPONENT ELEMENT OF FILM-FORMING CHAMBER
COMPOSITE Al MATERIAL REACTING WITH WATER, Al FILM REACTING WITH WATER, METHOD FOR OBTAINING Al FILM, AND COMPONENT ELEMENT OF FILM-FORMING CHAMBER
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机译:与水反应的复合铝材料,与水反应的铝膜,获得铝膜的方法以及成膜室的组成要素
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FIELD: metallurgy.;SUBSTANCE: composite material for obtaining the film contains aluminium material with purity of 4NAl or 5NAl, containing In added in quantity of 2 to 5 wt % and Si, including Si in the form of impurity to basic Al material, in total quantity of 0.04 to 0.6 wt % in terms of Al quantity. Film is obtained by thermal spraying of molten metal to surface of basic material with its further consolidation by means of hardening.;EFFECT: simplifying the removal of film from parts of film-forming chambers of film formation devices.;5 cl, 3 dwg, 3 ex
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