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Purification of substrate surfaces by means of co2 and n2o
Purification of substrate surfaces by means of co2 and n2o
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机译:通过co2和n2o净化基材表面
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摘要
A process for the purification of the substrate surfaces, in which carbon dioxide, the at least temporarily of nitrous oxide, as a cleaning agent to the substrate surface is brought into contact, characterized in that the cleaning agent 5 to 20 vol -% of nitrous oxide, the remainder being carbon dioxide, contains.
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