Plasma - radiation source and arrangement for generating a gas curtain, for plasma - radiation sources

摘要

Plasma - radiation source, the of a source area in a vacuum chamber (1) in a defined spatial radiation emitted by a for the debris - suppression and provided by means of a supersonic - gas jet (7) gas curtain formed along an axis (x - x) of the average direction of propagation of the radiation field, and in which for the generation of the supersonic - gas jet (7) and for leading out from the vacuum chamber (1) a gas jet - vacuum pump (3) is provided, consisting of a on the axis (x - x) of the average direction of propagation arranged driving nozzle (2), a coaxially to the axis (x - x) and arranged to form an annular neck (9) tapering annular mixing nozzle (8), the gas inlet opening located in the ring center on the drive nozzle (2) and a ring which is directed away from the center of the annular diffuser (10), in which the annular neck (9), which merges.