A method for the production of functional fluorine - carbon - polymer layers by means of plasma polymerisation of perfluorocycloalkanen and thus coated substrates

摘要

A method for the production of fluorine - carbon layers on a substrate by means of a low pressure - plasma process, wherein a substrate is provided, with a discharge between at least two electrodes from cyclic fluorocarbon compounds containing reactive gas a plasma is generated and polymeric fluorine - carbon layers be applied to the substrate and wherein in a first time segment of the application of the reactive gas hydrogen in a varying gas flow and thus fed to a gradient layer is applied on the substrate.