A method for the noncontact measurement of the topography

摘要

A method for the noncontact measurement of the topography of a spherical or aspherical curved air - glass - surface (s1) of an optical lens (2) or of an optical lens system comprising the steps of:a) the optical lens (2) or the lens system are rotatably mounted on the end side of a hollow shaft (1) is fastened in such a way that the optical axis of the lens (2) or of the lens system at least approximately with the axis of rotation (3) of the hollow shaft (1) is aligned;b) in the hollow shaft (1), a focusing optical system (6) for an optical measuring beam bundle (10) is arranged;c) the surface to be measured (s1) by means of a in the measuring direction is located in front of the air - glass - surface (s2) with the optical measuring beam bundle (10) is scanned;d) for each relevant measuring point on the surface to be measured, by means of the measuring beam (10) a distance to a fixed front surface of an optical measuring head is determined,e) wherein the distance by means of an absolutely be measured more wavelengths - interferometer (12) is determined; andf) the distance determination, for the..