首页> 外国专利> Device useful for pulling a single crystal made of semiconductor material, comprises a pot-like element, which shields the growing crystal from thermal radiation, and the cross-section of the pot-like element is reduced by a hole

Device useful for pulling a single crystal made of semiconductor material, comprises a pot-like element, which shields the growing crystal from thermal radiation, and the cross-section of the pot-like element is reduced by a hole

机译:用于提拉由半导体材料制成的单晶的装置包括一个锅状元件,该元件将生长中的晶体屏蔽在热辐射之下,并且该锅状元件的横截面减小了一个孔

摘要

Device comprises a pot-like element, which shields the growing crystal from thermal radiation, where a cross-section of the pot-like element is reduced by at least one hole. Independent claims are also included for: (1) a method comprising arranging the multiple holes in the pot-like element into a circular pattern, and situating it in the vicinity of the cooling element; and (2) a method for determining and adjusting the thermal conduction of the pot-like element for shielding thermal radiation in the device for pulling a single crystal, where the device comprises a cooling element, which is filled with hot water, and the spread of the temperature in the pot-like element is observed using a thermographic camera, and is adjusted by means of screwing or by removing screws holes inserted into the pot-like element.
机译:该装置包括盆状元件,该盆状元件将生长中的晶体屏蔽在热辐射之下,其中盆状元件的横截面减小了至少一个孔。还包括以下独立权利要求:(1)一种方法,包括将盆状元件中的多个孔排列成圆形图案,并将其放置在冷却元件附近。 (2)确定和调节用于屏蔽单晶提拉装置中的热辐射的罐状元件的热传导的方法,其中该装置包括冷却元件,该冷却元件填充有热水,并且散布使用热像仪观察锅状元件中的温度的变化,并通过拧入螺钉或通过移除插入锅状元件中的螺钉孔进行调节。

著录项

  • 公开/公告号DE102010023100A1

    专利类型

  • 公开/公告日2011-12-15

    原文格式PDF

  • 申请/专利权人 SILTRONIC AG;

    申请/专利号DE20101023100

  • 发明设计人 KNERER DIETER;

    申请日2010-06-09

  • 分类号C30B15/14;

  • 国家 DE

  • 入库时间 2022-08-21 17:05:33

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