Micro-electro-mechanical system microphone for use in mobile telephone, has sound inlet port arranged in cover or in carrier, and sealing structure attached around sound inlet port on microphone

摘要

The microphone has a microphone chip (MC) mounted on a carrier (TR), and a cover (AD) enclosing a cavity together with the carrier, where the chip is arranged within the cavity. A sound inlet port (SO1) is arranged in the cover or in the carrier, and a sealing structure (DS) is attached around the sound inlet port on the microphone. The sealing structure consists of elastomer and a foamed structure, and is formed from elastic material in form of a closed ring or a frame. A flexible film is applied over the sound inlet port. Independent claims are also included for the following: (1) a method for manufacturing a MEMS microphone (2) an electric appliance comprising a MEMS microphone.