Support for a silicon block, carrier arrangement with such a carrier and method for producing such a carrier arrangement

摘要

A carrier for a silicon block is designed to be firmly connected to the silicon block as part of a carrier arrangement together with a carrier lower part and to be moved together with it for processing by sawing, cleaning or the like. The carrier has on its underside facing the silicon block several channels and the lower part of the carrier glued here, the channels lying on top of each other. Water is introduced into the channels from above in the carrier and can run through saw slots in the lower part of the carrier between the wafers of the sawn-off silicon block for cleaning.