Microfocus X-ray tube of computed tomography system used for non-destructive testing of e.g. printed circuit board, has coil arrangement with cooling device for discharging cooling medium through flow channel

摘要

The microfocus X-ray tube (2) has a coil arrangement (12) for generating and directing electron beam (8) towards a target (6). The coil arrangement is comprised of a deflection coil, a condenser coil and a lens coil. A cooling device that discharges cooling medium through a flow channel (20), is provided in the coil arrangement. A controller is connected to a temperature sensor in the coil arrangement.