Method for material-conclusive joining of micro-scale component and nano-scale component, involves pressing activated joint component surfaces together without adding welding-rod materials and activating surfaces above ambient temperature

摘要

The method involves carrying out exclusive localized activation of joint surfaces of a micro-scale component (1) and a nano-scale component (2) using focused particle beams e.g. focused gallium ion beams (3, 4) or focused electron beams, in a high vacuum or an ultra high vacuum. Activated joint components surfaces are pressed together without adding welding-rod materials and thermally activating the joint surfaces above ambient temperature. The activated joint surfaces are continuously scanned for preventing renewed passivation of surfaces by gas atmosphere.