A method for producing precision movements within of objects with high accelerations and apparatus for this purpose

摘要

The invention relates to a method for producing precise movements of objects with high accelerations, wherein the movement of the objects (1) is carried out on a device in 6 translational axes by means of a z-slide, a y-slide, and an x-slide. The movement of the height axis on the z-slide is carried out along three parallel axes z1 (8), z2 (9), z3 (10), and in addition to the z-coordinate, the movement is adjusted by small angles in ϕ_x (20) and ϕ_y (22) by means of small corresponding path differences between the axes z1 (8), z2 (9), z3 (10). A y-slide (5) which is moved on the z-slide (11) and which supports the x-slide (4) is moved along 2 parallel translational axes y1 (6) und y2 (7), and in addition to the movement in the y direction using different specifications for y1 (6) and y2 (7), said y-slide is moved by an angle specification of a small value for ϕ_z (18) so that an object (1) lying on the x-slide (4) is moved on a movement path in 6 degrees of freedom in a defined manner. An orientation [x;y;z; ϕ_x;ϕ_y;ϕ_z] for the object (1) to be moved is always specified by corresponding longitudinal coordinates of the 6 translational axes x (3);y1 (6);y2 (7);z2 (8);z2 (9);z3 (10) by a controller.