Adapter device used for attaching transportation cassette on semiconductor wafer during manufacture of semiconductor device, has electric connection line which is provided for connecting antenna of load port and transponder

摘要

The device has a load port (1) which is provided for mounting a wafer transport container (6a). An electric connection line is provided for connecting the antenna (4) of load port and a transponder provided on the transport cassette. The spacing between the radio frequency identification (RFID) antenna and antenna of load port is set to 10-12 mm. The spacing between the loop antenna and transponder of transport cassette is set to 13-15 cm. The power of the RFID antenna provided with metal rear wall is set to specific value.