Inspection lens for use in inspection device for optical inspection of object, comprises primary optical lens group for illuminating object, and secondary optical lens group, which is arranged on side behind primary optical lens group

摘要

The inspection lens (101) comprises a primary optical lens group (110) for illuminating the object, and a secondary optical lens group (118), which is arranged on the side behind the primary optical lens group facing away from an object (102) outside the optical axis of the primary lens group. An illumination beam path (112) is provided for illuminating the object. An aperture diaphragm (116) is provided for an imaging beam path (114). An independent claim is also included for an inspection device comprises a sensor.