A method for operating a two beam - color point sensor system for simultaneously measuring two surface zones

摘要

A system and method make a two beam - color point sensor (cps) - system is available, that is operative to measure the same time two surface zones. In one exemplary embodiment, it is possible, at a single beam - cps - optics pin be provided with a two beam device. A first and second measuring beam of the system can be constructed on the respective first and second surface zones are positioned, and both reflect light by means of a confocal diaphragm of the two beam - cps. It is at least one set of measurements is determined, the first and second measurement comprises, which are composed of the first and second measuring beam are. At least the first surface zone can be moved, to sets of measurements at different positions to detect. Each measurement, with extremely fine resolution (for example, at least 10 nm finely) are determined. The system and method meet application purposes, which require such a degree of accuracy and resolution, without the use of an interferometer, or other costly and complex elements.