Apparatus and method of measurement of birefringence, apparatus for the suppression of deformation and polarimeter

摘要

The invention relates to a measuring apparatus of the birefringence is adapted to calculate an item of polarization of light emitted from an object (103) to be mesurée.il comprises a light source (101), a first polarization element (102), a plate (104) carrying the article (103), at least one unit (105) of division of the beam which divides the light coming from the object by two beams having the same polarization as that of said light, and at least two second polarization elements (106, 108) intended to extract the beams to be applied to two detectors (107, 109) of the quantity of lumière.domaine: manufacture of integrated circuits, etc, 1 / p