What is microstructure has walls optical determined and advantages of microstructures

摘要

The present invention relates to a process of formation of cavities (4) of a micro - optical device, comprising a), the formation on the flat surface of a substrate (10), with a layer (12) of a sacrificial material b) the formation of the walls (6) of said cavities, the bottom of said cavities (4) being formed by said layer of sacrificial material, c) the deposition in accordance with a layer (30) of absorbent material, on the tips (60) of the walls, on the sides (61, 62) of the walls, and on the bottom (4 ') of the cavities, d) the etching of the sacrificial layer (12), and the removal of the material of this layer and of the material of the layer (30) of absorbent material present at the bottom of the cavities (4)