What is microstructure has walls optical determined and advantages of microstructures

摘要

The method involves forming a sacrificial material layer on a surface of a support substrate (10), and forming walls (6) of cavities (4) whose bottom (4') is formed by the sacrificial material layer. A porous material layer (30) i.e. optical layer, is deposited to determine optical property on peaks (60) and sides (61, 62) of the walls and the bottom of the cavities. The sacrificial material layer is etched, and the sacrificial material of the sacrificial material layer and the porous material of the porous material layer are removed at the bottom. The optical material layer is an absorbent layer or reflective layer. An independent claim is also included for a micro-optical device comprising cavities delimited by walls.