METHOD FOR PEELING THIN FILM, APPARATUS FOR PEELING THIN FILM, AND THIN FILM WITH CARRIER FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for peeling a thin film capable of easily peeling a thin film from a base film without damaging the thin film and easily treating the peeled thin film, an apparatus for peeling a thin film, and a thin film with a carrier film.;SOLUTION: A method for peeling a thin film comprises holding a thin film 2 formed on a base film 3 onto a carrier film 4 to peel the thin film 2 from the base film 3, more specifically, comprises steps of: overlapping the carrier film 4 having air permeability onto the base film 3 on which the peelable thin film 2 is formed so as to sandwitch the thin film 2 with the base film 3; applying negative pressure to the thin film 2 through the carrier film 4; and transferring the base film 3 in a direction away from the carrier film 4 while applying negative pressure. The apparatus 1 for performing peeling, and the thin film 5 with the carrier film obtained by holding the thin film 2 onto the carrier film 4 are also provided.;COPYRIGHT: (C)2013,JPO&INPIT