METHOD FOR INSPECTING SHADING CORRECTION CHART OF IMAGE SENSOR USING TWO-DIMENSIONAL SCANNING METHOD, INSPECTION APPARATUS, AND IMAGE SENSOR

摘要

PROBLEM TO BE SOLVED: To solve such problems that, in adjusting and testing an image sensor, in a case where the image sensor comprises a plurality of sensor chips, when there are large differences among output luminances of the sensor chips due to an influence of sensitivity difference of the sensor chips, 1) a standard variation value of output luminance for defining an acceptable range becomes large and 2), in a boundary part of the sensor chips, a difference between an average value of luminances in a sub-scanning direction of a pixel of interest and an average value of luminances of peripheral pixels of the pixel of interest becomes large, thus making it difficult to determine propriety of the image sensor.SOLUTION: A method for inspecting a shading correction chart for an image sensor includes the steps of: sorting data that is obtained by photographing using a same pixel of an image sensor out of data of the shading correction chart that is obtained by photographing two-dimensionally, in order of luminance; generating difference data of a maximum value and a minimum value of the luminance data of the same pixel; and, when there is a part with a prescribed threshold or more in the difference values, detecting that there are foreign substances and defects on the shading correction chart at the part.