ZIRCONIA COMPOSITE POWDER FOR POLISHING AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a polishing agent having a performance comparable to a conventional ceria polishing agent while reducing a using quantity of ceria.;SOLUTION: The zirconia composite powder for polishing can be used as a polishing agent having performance comparable to the conventional ceria polishing agent while reducing the using quantity of the ceria by using powder for polishing agent comprising zirconia particle as a matrix and ceria/zirconia composite powder in which ceria crystal and/or the crystal of the ceria/zirconia solid solution are bonded to the surface of the same as the polishing agent.;COPYRIGHT: (C)2013,JPO&INPIT