STAR POLYMER, AND ATOM TRANSFER RADICAL POLYMERIZATION INITIATOR

摘要

PROBLEM TO BE SOLVED: To provide a novel star polymer expected to be utilized as a resist material excellent in high sensitivity and high resolution; and to provide a novel atom transfer radical polymerization initiator used for the synthesis of the polymer.;SOLUTION: The star polymer has a structure in which arm parts composed of polymer chains obtained by an atom transfer radical polymerization method extend from a core part originated from an atom transfer radical polymerization initiator represented by formula (1), wherein R is an a-valent organic group, and a is 2 to 20; A₁ is a bond group cleavable by an action of an acid; A₂ is a 1-12C alkylene group or an arylene group; and A₃ is an organic group containing a substituent having a halogen atom.;COPYRIGHT: (C)2013,JPO&INPIT