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Star polymer and the atom transfer radical polymerization initiator
Star polymer and the atom transfer radical polymerization initiator
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机译:星型聚合物与原子转移自由基聚合引发剂
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摘要
PROBLEM TO BE SOLVED: To provide a novel star polymer expected to be utilized as a resist material excellent in high sensitivity and high resolution; and to provide a novel atom transfer radical polymerization initiator used for the synthesis of the polymer.;SOLUTION: The star polymer has a structure in which arm parts composed of polymer chains obtained by an atom transfer radical polymerization method extend from a core part originated from an atom transfer radical polymerization initiator represented by formula (1), wherein R is an a-valent organic group, and a is 2 to 20; A1 is a bond group cleavable by an action of an acid; A2 is a 1-12C alkylene group or an arylene group; and A3 is an organic group containing a substituent having a halogen atom.;COPYRIGHT: (C)2013,JPO&INPIT
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机译:解决的问题:提供一种新颖的星形聚合物,该星形聚合物有望用作具有高灵敏度和高分辨率的抗蚀剂材料。 ;目的是提供一种用于聚合物合成的新型原子转移自由基聚合引发剂。由式(1)表示的原子转移自由基聚合引发剂,其中R为a价有机基团,且a为2至20; A 1 Sub>是可通过酸作用裂解的键基。 A 2 Sub>是1-12C的亚烷基或亚芳基; A 3 Sub>是含有具有卤素原子的取代基的有机基团。; COPYRIGHT:(C)2013,JPO&INPIT
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