FLEXIBLE STRUCTURE MANUFACTURING METHOD, INTERMEDIATE STRUCTURE AND FLEXIBLE STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide an easy-to-handle flexible structure by which a micro engineering or micro-electronic engineering step can be executed.SOLUTION: A method of manufacturing a flexible structure (13) includes: a step of injecting ion species to first and second source substrates (1, 2) for forming first and second embrittled regions (3.5, 4.6) in which a boundary of first and second thin films (3, 4) is set; a step of preparing a flexible substrate (9) with rigidity R of 10GPa mor less; a step of fixing the first and second thin films (3, 4) on the first and second faces of the flexible substrate (9) for forming a laminate (12) including a flexible structure (13) whose boundary is set by the first and second embrittled regions (3.5, 4.6), the flexible structure (13) having a reinforcement effect capable of moving the first and second thin films (3, 4); and a step of applying a crushing heat history for moving the first and second thin films (3, 4) onto the flexible substrate (9).