METHOD FOR REPRODUCING CERIUM OXIDE-BASED ABRASIVE SLURRY AND REPRODUCED CERIUM OXIDE-BASED ABRASIVE SLURRY

摘要

PROBLEM TO BE SOLVED: To reproduce performance as abrasive by simple reproduction processing in used abrasive slurry.;SOLUTION: This method for reproducing the cerium oxide-based abrasive slurry for polishing a glass material includes the following processes: a first process for removing polishing waste having a larger particle size than that of the abrasive from the used abrasive slurry after polishing the glass material; a second process for removing polishing waste having a smaller particle size than that of the abrasive from the used abrasive slurry after polishing the glass material; and a third process for obtaining the reproduced cerium oxide-based abrasive slurry by adding metal fluoride to recovered abrasive slurry obtained by removing the polishing waste in the first process and second process.;COPYRIGHT: (C)2013,JPO&INPIT