SAMPLE SUPPORT FOR TRANSMISSION ELECTRON MICROSCOPE, TRANSMISSION ELECTRON MICROSCOPE AND THREE-DIMENSIONAL STRUCTURE OBSERVATION METHOD OF SAMPLE

摘要

PROBLEM TO BE SOLVED: To provide a versatile sample support capable of acquiring the 360° omnidirectional information simply and accurately in three-dimensional structure observation using a transmission electron microscope, and to provide a three-dimensional structure observation method.;SOLUTION: The sample support for a transmission electron microscope includes a sample table provided, at the tip thereof, with a crystalline sample pedestal at least a part of which is single crystal, and a support substrate to which the sample pedestal is fitted removably. The sample pedestal can be fitted to the support substrate removably, even if it is rotated about the axis of rotating. The transmission electron microscope includes a sample holder on which a sample is mounted, and a sample movement mechanism which adjusts the position and the inclination angle of the sample holder. The transmission electron microscope includes the sample support on the sample holder. There is also provided a three-dimensional structure observation method of sample using the transmission electron microscope.;COPYRIGHT: (C)2013,JPO&INPIT