METHOD FOR MEASURING AMOUNT OF DROPLET, METHOD FOR MEASURING PARTICLE SIZE DISTRIBUTION, AND DROPLET DISCHARGE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring an amount of droplets capable of accurately measuring the amount of droplets, and a droplet discharge device capable of accurately controlling the amount of droplets by using this.;SOLUTION: The first analysis controller 9 determines the quality of a nozzle 13 by crawling up of a liquid and calculates the volume of a spherical body 31 based on an image data of a leading end part of the nozzle 13 photographed by a first camera 7 and a spherical body 31 formed in the leading end part, and performs the feedback control of the amount of droplets discharged from a droplet discharge head based on the calculated volume.;COPYRIGHT: (C)2013,JPO&INPIT