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METHOD FOR MEASURING AMOUNT OF DROPLET, METHOD FOR MEASURING PARTICLE SIZE DISTRIBUTION, AND DROPLET DISCHARGE DEVICE
METHOD FOR MEASURING AMOUNT OF DROPLET, METHOD FOR MEASURING PARTICLE SIZE DISTRIBUTION, AND DROPLET DISCHARGE DEVICE
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机译:液滴量的测定方法,粒径分布的测定方法以及液滴排出装置
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摘要
PROBLEM TO BE SOLVED: To provide a method for measuring an amount of droplets capable of accurately measuring the amount of droplets, and a droplet discharge device capable of accurately controlling the amount of droplets by using this.;SOLUTION: The first analysis controller 9 determines the quality of a nozzle 13 by crawling up of a liquid and calculates the volume of a spherical body 31 based on an image data of a leading end part of the nozzle 13 photographed by a first camera 7 and a spherical body 31 formed in the leading end part, and performs the feedback control of the amount of droplets discharged from a droplet discharge head based on the calculated volume.;COPYRIGHT: (C)2013,JPO&INPIT
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