SUBSTRATE FOR SUSPENSION, SUSPENSION, HEAD-ATTACHED SUSPENSION, COMBINATIONAL BODY OF HEAD-ATTACHED SUSPENSION AND EXTERNAL CONNECTION SUBSTRATE, AND HARD DISK DRIVE

摘要

PROBLEM TO BE SOLVED: To provide a substrate for suspension capable of reducing wearing of a bonding tool used for attaching an external connection substrate, and improving bonding reliability with external terminals of the external connection substrate.SOLUTION: A substrate 1 for suspension comprises an insulation layer 10, a metal supporting layer 20, and a wiring layer 30. The wiring layer 30 includes a plurality of wiring 31, and a plurality of connection terminals 33 each capable of being ultrasonically bonded to an external terminal 132 of an external connection substrate 131 using a bonding tool 60. The insulation layer 10 and the metal supporting layer 20 are provided with openings 70 for exposing the connection terminals 33. Each of the connection terminals 33 includes a tool surface 35 pressed by the bonding tool 60 and a bonding surface 36 ultrasonically bonded to the external terminal 132 of the external connection substrate 131. The surface roughness of the tool surface 35 of each connection terminal 33 is smaller than that of the bonding surface 36.