Mask inspection system and method using Fourier filtering and image comparison, lithography system and scan detection system

• 1. 借助傅里叶滤光和图像比较的掩模检查 [P] . 中国专利： CN102395923B . 2014.05.07
• 2. 借助傅里叶滤光和图像比较的掩模检查 [P] . 中国专利： CN102395923A . 2012-03-28
• 3. Fourier filtering and mask inspection system and method of using the image comparison and a lithography system, [P] . 日本专利： JP5872452B2 . 2016-03-01

  机译： 傅里叶滤波和掩模检查系统以及使用图像比较和光刻系统的方法，

• 4. Mask inspection using image comparison and Fourier filtering [P] . 日本专利： JP2012523552A . 2012-10-04

  机译： 使用图像比较和傅里叶滤波进行口罩检查

• 5. SCANNING COHERENT DIFFRACTIVE IMAGING METHOD AND SYSTEM FOR ACTINIC MASK INSPECTION FOR EUV LITHOGRAPHY [P] . 韩国专利： KR20160021223A . 2016-02-24

  机译： EUV光刻的扫描相干衍射成像方法和系统

• 1. A fast and adaptive method for automatic weld defect detection in various real-time X-ray imaging systems [J] . 邵家鑫, 都东, 石涵, 中国焊接：英文版 . 2012,第001期
• 2. A Delay System Approach to Fault Detection Filter of Networked Control Systems [J] . MA Li-wei, TIAN Zuo-hua, SHI Song-jiao, 东华大学学报（英文版） . 2009,第001期
• 3. Recognition Methods of Geometrical Images of Automata Models of Systems in Control Problem [J] . Anton Epifanov 机械工程研究(英文) . 2021,第002期
• 4. Enhanced defect detection capability using learning system for extreme ultraviolet lithography mask inspection tool with projection electron microscope optics [J] . Ryoichi Hirano, Masahiro Hatakeyama, Kenji Terao, Journal of microanolithography, MEMS, and MOEMS . 2016,第2期
• 5. Aerial Image Mask Inspection System for Extreme Ultraviolet Lithography [J] . Hiroo Kinoshita, Kazuhiro Hamamoto, Nobuyuki Sakaya, Japanese journal of applied physics . 2007,第9BPt1期
• 6. Singular spectrum analysis filtering and Fourier inversion: an efficient and fast way to improve resolution and quality of current density maps with low-cost Hall scanning systems [J] . Amoros Jaume, Duran Arnau, Carrera Miguel, Measurement Science & Technology . 2019,第1期
• 7. Image sensing method and defect detection algorithm for a 256-Mbit and 1-Gbit DRAM mask inspection system [C] . Hiromu Inoue, Toshiba Corp., Yokohama-shi Kanagawa, Photomask and X-Ray Mask Technology IV . 1997
• 8. Modeling, detection and protection schemes for extreme ultraviolet lithography (EUVL) mask carrier systems. [D] . Yook, Se-Jin. 2007
• 9. Intelligent Image-Based Railway Inspection System Using Deep Learning-Based Object Detection and Weber Contrast-Based Image Comparison [O] . Jinbeum Jang, Minwoo Shin, Sohee Lim, 2019
• 10. Volume 2, Issue 3, Special issue on Recent Advances in Engineering Systems (Published Papers) Articles Transmit / Received Beamforming for Frequency Diverse Array with Symmetrical frequency offsets Shaddrack Yaw Nusenu Adv. Sci. Technol. Eng. Syst. J. 2(3), 1-6 (2017); View Description Detailed Analysis of Amplitude and Slope Diffraction Coefficients for knife-edge structure in S-UTD-CH Model Eray Arik, Mehmet Baris Tabakcioglu Adv. Sci. Technol. Eng. Syst. J. 2(3), 7-11 (2017); View Description Applications of Case Based Organizational Memory Supported by the PAbMM Architecture Martín, María de los Ángeles, Diván, Mario José Adv. Sci. Technol. Eng. Syst. J. 2(3), 12-23 (2017); View Description Low Probability of Interception Beampattern Using Frequency Diverse Array Antenna Shaddrack Yaw Nusenu Adv. Sci. Technol. Eng. Syst. 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J. 2(3), 48-59 (2017); View Description Improving customs’ border control by creating a reference database of cargo inspection X-ray images Selina Kolokytha, Alexander Flisch, Thomas Lüthi, Mathieu Plamondon, Adrian Schwaninger, Wicher Vasser, Diana Hardmeier, Marius Costin, Caroline Vienne, Frank Sukowski, Ulf Hassler, Irène Dorion, Najib Gadi, Serge Maitrejean, Abraham Marciano, Andrea Canonica, Eric Rochat, Ger Koomen, Micha Slegt Adv. Sci. Technol. Eng. Syst. J. 2(3), 60-66 (2017); View Description Aviation Navigation with Use of Polarimetric Technologies Arsen Klochan, Ali Al-Ammouri, Viktor Romanenko, Vladimir Tronko Adv. Sci. Technol. Eng. Syst. J. 2(3), 67-72 (2017); View Description Optimization of Multi-standard Transmitter Architecture Using Single-Double Conversion Technique Used for Rescue Operations Riadh Essaadali, Said Aliouane, Chokri Jebali and Ammar Kouki Adv. Sci. Technol. Eng. Syst. 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• 11. Image Formation in Optical Systems That Utilize Amplitude and Phase Masks in the Fourier Image Plane [R] . Kelsey, J. F. 1965

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• 2. New LED light source system with uniform illumination for line-scan CCD imaging systems [J] . 张莲莲 ,黄庆梅 ,李心怡 . 北京理工大学学报：英文版 . 2016,第4期
• 3. 基于傅里叶谱分析的天气雷达图像插值方法 [C] . JIAO Pengcheng ,焦鹏程 ,WANG Zhenhui . 第34届中国气象学会年会 . 2017
• 4. 光刻胶傅里叶全息图的记录条件及防伪应用研究 [A] . 浦东林 . 2003