WORKPIECE POSTURE DETECTION METHOD, WORKPIECE POSTURE ADJUSTMENT METHOD, WORKPIECE POSTURE DETECTION DEVICE, WORKPIECE POSTURE ADJUSTMENT DEVICE, AND PROJECTION EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To project a vivid mask image on a workpiece by allowing direct detection of a tilt state of the workpiece and making a mask parallel with the workpiece on the basis of the detected tilt state.;SOLUTION: A pattern 23 formed on a mask 13 is projected on a workpiece 14 on a stage by a projection lens 10 to expose the workpiece. Four alignment marks 22 preliminarily formed on the workpiece 14 are photographed by auto-focusing with four cameras 31 which are provided between the projection lens 10 and the stage 12 and are arranged at prescribed distances d1, d2, d3, and d4 from the stage 12 (S3), a tilt state T of the workpiece W is determined on the basis of the distances d1, d2, d3, and d4 of the cameras 31 and focus positions D1, D2, D3, and D4 acquired by the cameras 31 respectively (S4 and S5), a tilt stage 15 is driven so as to resolve the tilt state of the workpiece 14 (S6 and S7), and the workpiece 14 and the mask 13 are arranged in parallel to perform exposure (S9).;COPYRIGHT: (C)2014,JPO&INPIT