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SEMICONDUCTOR PHOTOCATHODE AND METHOD FOR MANUFACTURING THE SAME, ELECTRONIC TUBE, AND IMAGE INTENSIFIER TUBE
SEMICONDUCTOR PHOTOCATHODE AND METHOD FOR MANUFACTURING THE SAME, ELECTRONIC TUBE, AND IMAGE INTENSIFIER TUBE
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机译:半导体光电阴极及其制造方法,电子管和图像增强管
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摘要
PROBLEM TO BE SOLVED: To provide a semiconductor photocathode capable of improving quantum efficiency as compared with the conventional GaN photocathode, and a method for manufacturing the semiconductor photocathode.;SOLUTION: When XMIN(M) represents a minimum value for a composition ratio X in an intermediate region 1M, and XMIN(2) represents a minimum value for a composition ratio X in a second region 12, in a first region 11, 0≤g(x)≤XMIN(M) is satisfied, in the intermediate region 1M, g(x) is a monotone decreasing function and g(x)≤XMIN(2) is satisfied, in the second region 12, g(x) is a monotone decreasing function or a constant value, in a case where g(x) in the second region 12 is a monotone decreasing function, a thickness D1 of the first region 11 is 18 (nm) or more, and in a case where g(x) in the second region 12 is a constant value, the thickness D1 of the first region 11 is 31 (nm) or more.;COPYRIGHT: (C)2014,JPO&INPIT
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