MAGNETIC LEVITATION VACUUM PUMP, WHIRLING ESTIMATION METHOD, ROTOR BALANCE INSPECTION METHOD, AND METHOD FOR ADJUSTING MAGNETIC BEARING CONTROL GAIN

摘要

PROBLEM TO BE SOLVED: To provide a whirling estimation method that can facilitate estimating whirling by using a waveform amplitude value, without measuring the whirling in a high-speed rotation state.;SOLUTION: The whirling estimation method for a magnetic levitation vacuum pump includes: a magnetic levitation step of magnetically levitating a rotor 30 to a target levitation position; a current measuring step of making the rotor 30, which is magnetically levitated at the target levitation position, sequentially stop at a plurality of rotation positions, and subsequently measuring each current of two pairs of electromagnets in each stopped state; a difference calculation step of calculating differences in the current of the paired electromagnets about each of the plurality of rotation positions, regarding at least one of the two paired electromagnets; an amplitude value calculation step of calculating amplitude values in difference changes while the rotor 30 fully rotates; and an estimation step of estimating a whirling amount of the rotor 30, based on the relationship between a predetermined whirling amount and amplitude value, and the amplitude value calculated in the amplitude value calculation step.;COPYRIGHT: (C)2013,JPO&INPIT