PASS RATE ESTIMATION DEVICE, PASS RATE ESTIMATION METHOD, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a pass rate estimation device capable of reducing an amount of a material and the like produced excessively, in quality control in which a plurality of inspections are conducted.;SOLUTION: A pass rate estimation device inspects inspection objects for each lot by a first inspection method to estimate the possibility that rejected lots could pass a second inspection method different from the first inspection method if they were inspected by the second inspection method. The pass rate estimation device comprises: measurement value acquisition means that acquires measurement values of a current lot; past measurement value storage means DB5 and DB4 that store past measurement values and re-inspection pass rates of inspection items for past lots; deviation value calculation section 11 that calculates the deviations of the measurement values of the current lot with respect to standard values; past deviation storage means DB2 that stores past deviations of the past measurement values; a similarity calculation section 12 that calculates the magnitude of the difference between the current and past deviation for each inspection item; and re-inspection pass rate estimation section 14 that reads out the re-inspection pass rates of the past lots each having the difference within a prescribed value for each inspection item, to estimate a re-inspection pass rate of the current lot.;COPYRIGHT: (C)2013,JPO&INPIT