The laser processing by the appropriate laser optical head of each and multiple beam

摘要

Laser optical head configured to use a diffractive optical element (11), the focusing objective lens (13), and a (21) adjusting means, a laser scribing apparatus the present invention is a (10), adjusting means (21) is perpendicular the optical axis (16) focusing the objective lens (11) a diffractive optical element (13), and are spaced apart from each other a common optical axis of one (16) on relates to a laser optical head to rotate (11) diffractive optical element in the third plane. The present invention provides a reduction of the leakage current of the thin-film solar cell.