MULTIHEAD LINEAR MOTOR STAGE, ORIGIN SEEKING METHOD FOR THE SAME, AND SCRIBER DEVICE FOR SOLAR BATTERY

摘要

PROBLEM TO BE SOLVED: To provide a multihead linear motor stage capable of seeking an origin of each movable element without mutual collision of the movable elements.SOLUTION: A multihead linear motor stage comprises: a linear motor stage main body 11 in which a plurality of movable elements 2 are installed so as to be movable forward and backward along a common moving path K, to a stator 1; and a control device 50 controlling the movement of the plurality of movable elements 2 of this linear motor stage main body 11. The control device 50 comprises: a movable element alignment controller 53 aligning the plurality of movable elements 2 to one end side of the moving path K; a reference position detection controller 54 detecting a reference position common to the respective movable elements 2 while moving all aligned movable elements 2 to the other end side of the moving path K sequentially from the last aligned movable element 2; and an origin position setting controller 55 setting an origin position of a coordinate on the basis of the detected reference position.