The water soluble disconnection liquid for the fixed abrasive grain wire saw, cutting process and its recycling manner which use that

摘要

Provided are: a water-soluble cutting fluid for a fixed abrasive grain wire saw, causing little foaming and attaining high cutting performance; a cutting method using the same; and a recycling method therefor. A water-soluble cutting fluid for a fixed abrasive grain wire saw, characterized by comprising (a) a terpene-alkylene oxide block copolymer, (b) at least one component selected from among glycols, polyalkylene glycols, glycol ethers and polyalkylene glycol ethers, and (c) water; an ingot-cutting method characterized by cutting a silicon ingot with a fixed abrasive grain wire saw while applying the water-soluble cutting fluid for a fixed abrasive grain wire saw; and a recycling method for a water-soluble cutting fluid for a fixed abrasive grain wire saw.