Test handler equipped with a high low-temperature apparatus and high cooling apparatus

摘要

PROBLEM TO BE SOLVED: To provide a temperature raising/lowering device, and a test handler including the temperature raising/lowering device, for a semiconductor device or a device of an electronic component or the like wherein space saving and inexpensive high-speed processing of the whole device can be achieved, capable of raising/lowering a temperature of the semiconductor device or the device of the electronic component or the like.;SOLUTION: A temperature raising device 11 includes: a discoid table 21 including a plurality of pockets 24 as holding positions for placing a device on the surface, which is provided intermittently rotatably by control of a motor; a temperature raising means 22 for heating the device of the table 21; and a Y-axis driving source 22 for moving the table 21 in the Y-direction in the figure.;COPYRIGHT: (C)2010,JPO&INPIT