CHARGED PARTICLE RAY DRAWING DEVICE, DRAWING DATA GENERATION METHOD, DRAWING DATA GENERATING PROGRAM, AND METHOD OF MANUFACTURING ARTICLE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a drawing device which is advantageous in reducing effect of magnetic field generated by a blanking deflector array.;SOLUTION: The drawing device is a device which performs drawing on a substrate with a plurality of charged particle rays, and includes a blanking deflector array containing a plurality of blanking deflectors for blanking a plurality of charged particle rays, and a control part which controls the blanking deflector array on the basis of drawing data. The control part controls the blanking deflector array so that the positional error of a plurality of charged particle rays on the substrate which is caused by a magnetic field generated by the blanking deflector array when the control is made according to the drawing data is reduced.;COPYRIGHT: (C)2013,JPO&INPIT