THREE-DIMENSIONAL POSITIONING MICROSCOPE DEVICE FOR DOT-LIKE OBJECT AND MICROSCOPE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a three-dimensional positioning microscope device for a dot-like object and a microscope method.SOLUTION: The microscope device comprises: two imaging optical systems 26 and 26' for imaging a dot-like object in two separate image spaces in the form of focus light distributions 40 and 40'; two detection units 28 and 28' that capture analyzable light spots at the detection points of detection faces 27 and 27' arranged in the corresponding image spaces; and an evaluation unit configured such that the detection points of the two detection faces 27 and 27' are made to correspond to each other in a pair and the two light spots are analyzed, thereby ascertaining the lateral x-y position and axial z position of the dot-like object. The two imaging optical systems include optical means for obliquely directing their respective focus light distributions with respect to the detection axis perpendicular to the detection faces of the corresponding detection units. The inclinations of the two focus light distributions are opposite to each other and, thereby, the two light spots shift in opposite directions according to a change in the z position of the dot-like object.